Measurement of HBM, CDM & MM

Hello All,

How can we practically measure HBM at less than 100 volts, CDM at less than 200 volts, and MM at 35 volts?

What type of equipment’s are needed to measure the HBM, CDM & MM?

Thanks in advance.

This really related to ANSI/ESD SP17.1 Process Assessment. There are methods and equipment defined to measure events that are very low. The controls may not change depending on the process but the capablity of the process can be determined.