ESD Machine Qualification

Hello Everyone,

I would like to seek your advice regarding machine qualification.
As per ANSI SP10.1 stated on 6.2.2 Required measurements:
6.2.2.4 Using the ohm meter or megohm meter as appropriate for the range, measure and record the resistance between critical path components and the ground point on the equipment chassis.
(see Annex A).
Annex A (first bullet) states that:
•All stationary/fixed conductive machine elements are typically grounded within 1Ω.

Is it ok to use 1Ω as a requirement for those stationary critical paths?

An SP does not usually establish requirements. From an ESD point of view 1 ohm would be fine to use as a requirement. This could make it difficult to comply depending on how the parts of the machine are connected.